SENKO SI-310 built-in pyrolyzer for C4F6, C5F8, CH2F2, CH3F and similar semiconductor gases.
| Item | Value |
|---|---|
| Target gas | C₄F₆ / C₅F₈ / CH₂F₂ / CH₃F via pyrolysis |
| Sensor type | Pyrolyzer + cartridge |
| Measuring method | Sampling 100–1000 ml/min |
| Ingress protection | Ex enclosure |
| Explosion protection | Explosion-proof |
| Operating temperature | fab |
| Battery | 24 VDC, ~15 W (pyrolyzer 600 mA) |
| Dimension | 212 × 225 × 141.7 mm |
| Weight | 6.5 kg |
Cartridge sensor, flow display, 4–20 mA, 3 relays, RS-485/Ethernet/Bluetooth. ~6.5 kg.
| Model | SI-310 |
| Principle | Pyrolyzer + cartridge |
| Method | Sampling 100–1000 ml/min |
| IP | Ex enclosure |
| Certification | Ex d (catalog) |